Aerotech mid motion five coordinates precision positioning module with unique set of equipment and diagnostic and Light Conversion femtosecond Yb:KGW laser Pharos

Unit: Faculty of Physics

Keywords: Microfabrication, femtosecond laser, 5-axis positioning, Yb:KGW, Aerotech, Pharos

Responsible person: Dr. Domas Paipulas, tel. 85 2366290, , Prof. Valdas Sirutkaitis, tel. 8 5 2366005,

Module is suitable for microfabrication, investigation of femtosecond laser radiation and material interaction.

Technical parameters of the positioning system:

1) X and Y axis (ANT180-160-L): maximum motion is 160 mm, speed 350 mm/s, accuracy 300 nm.
2) Z axis (ANT130-060-L): maximum motion is 60 mm, speed 350 mm, accuracy 200 nm. Rotating axes technical parameters:
a) ADRS-150: rotating part diameter is 140 mm, accuracy ± 6 arc sec, resolution 0.315-31.5 μrad.
b) ANT130-360-R: ±360° rotation angle, accuracy ±10 arc sec; maximum speed 200 rps.
The system is assembled on a granite plate with control electronics. There are installed software for 5-axis positioning system management. The subsystem for beam management of 10 m/s positioning velocity and 1.5 m/s marking speed and the system for beam focusing to the sample with a 150 mm focal length for 1030/515/343 nm wavelength radiation are also integrated. The positioning systems is used with the 6W average power diode-pumped high repetition rate femtosecond Yb:KGW laser. The maximum repetition rate of the laser is 200 kHz, central wavelength is 1030 nm and pulse duration 320 fs.