Scanning electron microscope (SEM) Hitachi SU-70 with Energy-Dispersive X-ray (EDX) and Electron Backscatter Diffraction (EBSD) measurement accessories

Unit: Faculty of Chemistry and Geosciences

Keywords: Scanning electron microscope, SEM, Hitachi, SU-70, Energy-Dispersive X-ray measurement, EDX, Electron Backscatter Diffraction measurement, EBSD, chemical micro-analysis of solids, mapping crystallites

Responsible person: Simas Šakirzanovas, , +370 5 219 3190

Scanning electron microscope for morphological and structural studies of surface of various solids (surface imaging and visualization).

Microscope's EDS accessory for determining the local chemical composition in solid materials and for mapping the spatial distribution of chemical elements on the surface of the object under study; the microscope's EBSD detector is designed for mapping crystallites of polished crystal surface based on crystallographic plane.
Scanning electron microscope: Electron source - Shotki type field exhaust electron gun. Electron accelerating voltage from 0.5 to 20 kV. Maximum resolution of 1 nm for a standard sample. Measurements are performed in a vacuum (> 10-3 bar). Maximum sample size: diameter > 15 cm, height > 5 cm. 

Application. Research of solid surfaces using scanning electron microscope; chemical micro-analysis of solids using scanning electron microscope with EDS detector; mapping distribution of crystallites based on crystallographic plane.