Four point probe resistance measurement system with p/n typing unit for semiconductor applications (Jandel RM3000)

Unit: Faculty of Physics

Keywords: Sheet resistance, bulk resistance, four point probe method, Jandel, RM3000

Responsible person: Dr. Vitalijus Bikbajevas, tel.+37060034126,

Primary application of the system is sheet resistance and bulk resistance measurements.

There is an additional unit to determine whether material is p type or n type. A four point probe is used to avoid contact resistance, which can often be the same magnitude as the sheet resistance. A constant current is applied to two probes and the potential on the other two central probes. The measured data can be transferred and saved in to computer. It is ideal for small, various shape samples with flat surface.
Measures one sample at once.
Voltage measurement range: 0.01 - 1250 mV.
Current measurement range: 10 nA - 99.99 mA.
Sheet resistance measurement range: 1 mΩ/□ – 500 MΩ/□.
Bulk resistance measurement range: 1m Ω.cm - 1M Ω.cm.
Possibility to measure resistance out of range with a lower accuracy.
Sample diameter up to 76 mm. 

Application. Four point probe sheet, bulk resistance (resistivity) measurement system. The most suitable for Silicon, Germanium and metal thin films.