Apollo Camscan 300 Scanning electron microscope (SEM) with Oxford Instruments X-Max energy dispersive X-ray spectrometer (EDX), and Gatan Digiscan electron beam induced current measurement setup (EBIC)

Unit: Faculty of Physics

Keywords: Scanning electron microscope, SEM, energy dispersive X-ray spectrometer, EDX, electron beam induced current, EBIC, solid state sample surface, chemical microanalysis, Apollo Camscan, Oxford Instruments, X-Max, Gatan Digiscan

Responsible person: Dr. Arūnas Kadys, tel. +37060034126,

Investigation of morphology of solid state sample surface with SEM.

 Spatial chemical composition analysis with EDX. Invesitigation of carrier diffusion length, spatial distribution of defects by EBIC.
SEM:
1. Cold field emission Schottky electron gun.
2. Detectors – secondary electron, back scattered electron.
3. Accelerating voltage – 5 -10 kV.
4. Max. resolution – 2 nm at 20 kV.
5. Sample must be in high vacuum (from 10-7 Bar).
6. Max. sample size 15 cm, max. sample height 5 cm.
EDX:
1. Resolution Mn Ka 100,000 pulses per second at 125 eV range.
2. Elements for detection form Be(4) till Pu(94).
3. Detector active area - 50 mm2.
Software features: dotted, linear or spatial analysis of chemical element distribution is possible, automatic or manual recognition of a chemical element.
EBIC:
- The EBIC signal is associated with the SEM image.
- There are EBIC signal optimization tools.
- It is possible to measure U-I characteristics of the sample.
- The specimen holder has 2 probes.
- The specimen holder can be rotated up to 180 degreees.
- Maximum sample diameter 1 cm.

Application. A scanning electron microscope (SEM) produces images of a sample by scanning it with a focused beam of electrons. Elemental analysis or chemical characterization of a sample by EDX. EBIC semiconductor analysis to identify buried junctions or defects in semiconductors.